Multi-junction photodiode in application of molecular detection and discrimination, and method for fabricating the same

ABSTRACT

A multi junction photodiode for molecular detection and discrimination and fabrication methods thereof. The multi junction photodiode includes a substrate having first conductive type dopants, an epitaxial layer having the first conductive type dopants, a deep well having second conductive type dopants, a first well having the first conductive type dopants, a second well having the second conductive type dopants, a third well having the first conductive type dopants, and a first doped region having the second conductive type dopants. The epitaxial layer is disposed on the substrate. The deep well is disposed in the epitaxial layer. The first well having three sides connected to the epitaxial layer is disposed in the deep well. The second well is disposed in the first well. The third well having three sides connected to the epitaxial layer is disposed in the second well. The first doped region is disposed in the third well.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of U.S. patent application Ser. No. 13/444,809, filedon Apr. 11, 2012, now allowed. The prior U.S. patent application Ser.No. 13/444,809 claims the priority benefit of Taiwan application serialno. 100139395, filed on Oct. 28, 2011. The entirety of each of theabove-mentioned patent applications is hereby incorporated by referenceherein and made a part of this specification.

BACKGROUND OF THE INVENTION

Field of the Invention

The present application relates to a semiconductor structure and amanufacturing method thereof. More particularly, the present applicationrelates to a photodiode array compatible with the CMOS manufacturingprocesses and the manufacturing method thereof.

Description of Related Art

Complementary metal oxide semiconductor (CMOS) image sensor (also calledCIS) can be fabricated using the processes compatible with CMOS logicdevice manufacturing processes and can be easily integrated withperipheral circuits on the same chip, thus significantly reducing thecosts and lowering the power of the image sensor. In recent years, CMOSimage sensors become increasingly notable as CMOS image sensors havebeen widely applied for image display applications, including, but notlimited to, alarm systems, surveillance systems, industrial monitoringand biochemical detection, etc. However, the conventional CMOS imagesensors are limited by the use of color filter and unsuitable for highsensitivity applications.

U.S. Pat. No. 6,727,521 discloses a vertical color filter pixel sensorapplicable for image sensors. As shown in its FIGS. 1 and 3, the multijunction structure demonstrates different quantum efficiency in thephotodiodes disposed at different depth for blue, green and red light.However, the manufacturing processes of this structure are complicatedand require two additional silicon epitaxy processes and a plurality ofion implantation processes. In FIG. 3, the first epitaxy process (66) isformed between the red and green diodes. The second epitaxy process (72)is fonned between the blue and green diodes. As no isolation existsbetween the diodes, there is concern that the spatial resolution wouldbe lowered. In addition, the two additional silicon epitaxy processesalso increase the production costs.

In FIG. 2B of U.S. Pat. No. 7,470,946, the blue light detection regionis denoted 202, the green light detection region is denoted 204 and thered light detection region is denoted 206. However, the silicon oninsulator (SOI) technology, which is still in its infant stage, isemployed, leading to low yield.

U.S. Pat. No. 6,841,816 describes a method of forming a vertical colorfilter sensor on the silicon substrate. In its FIG. 12, across-sectional view of a single sensor is illustrated. Silicon dioxideis used between the sensors to prevent the carrier diffusion from theadjacent sensors, so as to avoid cross-talk. In addition, the arsenicion is implanted with a voltage of 1200 keV to form the junction in adepth of 1 μm, which is not commonly used condition for the conventionalsemiconductor processes. The formation of the extra silicon dioxideinsulating layers further complicates the manufacturing processes. Theinterface of the epitaxy layer is located between the multi junctiondiodes, which leads to the increase of dark currents and the reductionof the quantum efficiency.

U.S. Pat. No. 7,651,883 discloses using the U-shaped well regionssurrounding each multi junction photodiode to avoid the reduction of thespatial resolution by preventing the carriers diffusing into theadjacent photodiodes. The photodiodes are fabricated directly on the ntype silicon substrate without the needs of the epitaxy layer. Althoughthe U-shaped well regions solves the spatial resolution problem owing tothe lack of outer isolation as described in U.S. Pat. No. 6,960,757, theformation of the U-shaped well surrounding the multi junction structurein this article employs high-energy ion implantation processes.Furthermore, the n type substrate used in this article is not compatiblewith the CMOS logic processes used in the semiconductor industry, thusnot suitable for mass production in foundries. In addition, emphasizedin this patent that the multi junction structure is formed directly onthe substrate without the need of epitaxy layers on the substrate, theleakage current could be larger due to defects in the substrate andawkward substrate planarity.

SUMMARY OF THE INVENTION

The present application is directed to a semiconductor device of themulti junction photodiode(s).

The present invention also provides a manufacturing method of thesemiconductor device compatible with the CMOS logic processes.

In the present application, a semiconductor device is provided,including a substrate having first conductive type dopants, an epitaxylayer having the first conductive type dopants; a deep well regionhaving second conductive type dopants, a first well region having thefirst conductive type dopants, a second well region having the secondconductive type dopants, a third well region having the first conductivetype dopants and a first doped region having the second conductive typedopants. The epitaxy layer is disposed on the substrate, and the deepwell region is disposed in the epitaxy layer. The first well region isdisposed in the deep well region, and three sides of the first wellregion are in contact with the epitaxy layer. The second well region isdisposed in the first well region. The third well region is disposed inthe second well region, and three sides of the third well region are incontact with the epitaxy layer. The first doped region is disposed inthe third well region.

In the present application, a semiconductor device is provided,including a substrate having first conductive type dopants, an epitaxylayer having the first conductive type dopants; a deep well regionhaving second conductive type dopants, a first layer region and a secondlayer region having the first conductive type dopants, at least a thirdlayer region having the first conductive type dopants, a fourth layerregion having the first conductive type dopants, and an optional firstdoped region having the second conductive type dopants. The epitaxylayer is disposed on the substrate, and the deep well region is disposedin the epitaxy layer. The first and second layer regions are disposed inthe deep well region, and three sides of the first and second layerregions are respectively in contact with the epitaxy layer. The secondlayer region is located above and unconnected to the first layer region.The third layer region is disposed in the deep well region, and thethird layer region is located above the first layer region to connectthe first layer region to the top surface of the epitaxy layer. Thefourth layer region is disposed in the deep well region, and the fourthlayer region is located above the second layer region to connect thesecond layer region to the top surface of the epitaxy layer. The firstdoped region having the second conductive type dopants is optionallyformed at the top.

In the present application, a semiconductor device is provided,including a substrate having first conductive type dopants, an epitaxylayer having the first conductive type dopants; a deep well regionhaving second conductive type dopants, a first layer region having thefirst conductive type dopants, at least a second layer region having thefirst conductive type dopants, a first well region having the firstconductive type dopants and a first doped region having the secondconductive type dopants. The epitaxy layer is disposed on the substrate,and the deep well region is disposed in the epitaxy layer. The firstlayer region is disposed in the deep well region, and three sides of thefirst layer region are in contact with the epitaxy layer. The secondlayer region is disposed in the deep well region. The second layerregion is located above the first layer region to connect the firstlayer region to the top surface of the epitaxy layer. The first wellregion is disposed in the deep well region. The first well region islocated above and unconnected to the first layer region, and three sidesof the first well region are in contact with the epitaxy layer. Thefirst doped region is disposed in the first well region.

In the present application, a fabrication method of a semiconductordevice is also provided. In the fabrication method, a substrate havingfirst conductive type dopants is provided. An epitaxy layer having thefirst conductive type dopants is formed on the substrate, and a deepwell region having second conductive type dopants is formed in theepitaxy layer. A first well region having the first conductive typedopants is formed in the deep well region, wherein three sides of thefirst well region are in contact with the epitaxy layer. A second wellregion having the second conductive type dopants is formed in the firstwell region. A third well region having the first conductive typedopants is formed in the second well region, wherein three sides of thethird well region are in contact with the epitaxy layer. A first dopedregion having the second conductive type dopants is formed in the thirdwell region.

In the present application, a fabrication method of a semiconductordevice is also provided. In the fabrication method, a substrate havingfirst conductive type dopants is provided. An epitaxy layer having thefirst conductive type dopants is formed on the substrate, and a deepwell region having second conductive type dopants is formed in theepitaxy layer. A first layer region and a second layer region having thefirst conductive type dopants are formed in the deep well region,wherein the second layer region is formed above and unconnected with thefirst layer region, three sides of the first layer region and threesides of the second layer region are respectively in contact with theepitaxy layer. At least a third layer region having the first conductivetype dopants is formed in the deep well region, wherein the third layerregion is formed above the first layer region to connect the first layerregion to the top surface of the epitaxy layer. A fourth layer regionhaving the first conductive type dopants is formed in the deep wellregion, wherein the fourth layer region is formed above the second layerregion to connect the second layer region to the top surface of theepitaxy layer. A first doped region having the second conductive typedopants is optionally formed at the top.

In the present application, a fabrication method of a semiconductordevice is also provided. In the fabrication method, a substrate havingfirst conductive type dopants is provided. An epitaxy layer having thefirst conductive type dopants is formed on the substrate, and a deepwell region having second conductive type dopants is formed in theepitaxy layer. A first layer region having the first conductive typedopants is formed in the deep well region, wherein three sides of thefirst layer region are in contact with the epitaxy layer. At least asecond layer region having the first conductive type dopants is formedin the deep well region, wherein the second layer region is formed abovethe first layer region to connect the first layer region to the topsurface of the epitaxy layer. A first well region having the firstconductive type dopants is formed in the deep well region, wherein thefirst well region is formed above and unconnected with the first layerregion, and three sides of the first well region are in contact with theepitaxy layer. A first doped region having the second conductive typedopants is formed in the first well region.

By depositing the well regions and the doped regions in the epitaxylayer, the multi junction photodiode, the semiconductor device of thisinvention, is formed. The semiconductor device has the characteristicsof low dark current, high sensitivity, and capability of detecting lightof various wavelength. Furthermore, the fabrication processes of thesemiconductor device of this invention can be integrated with thecurrent CMOS logic processes, so that the multi junction photodiodes canbe formed with the CMOS logic devices at the same time, thus simplifyingthe fabrication without significantly increasing the production costs.

In order to make the above and other features and advantages of thepresent invention more comprehensible, embodiments accompanied withfigures are described in details below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic top view of the semiconductor device of thisinvention according to the first embodiment.

FIG. 1B is a cross-sectional view of FIG. 1A along the line I-I′.

FIG. 2 is a schematic cross-sectional view of the semiconductor deviceof this invention according to the second embodiment.

FIG. 3 is a schematic cross-sectional view of the semiconductor deviceof this invention according to the third embodiment.

FIGS. 4A-4C are schematic cross-sectional view showing the manufacturingprocess steps for the semiconductor device of this invention accordingto the fourth embodiment.

FIGS. 5A-5C are schematic cross-sectional view showing the manufacturingprocess steps for the semiconductor device of this invention accordingto the fifth embodiment.

FIGS. 6A-6C are schematic cross-sectional view showing the manufacturingprocess steps for the semiconductor device of this invention accordingto the sixth embodiment.

FIG. 7 is the flow chart of the manufacturing process steps for thesemiconductor device of this invention according to the fourthembodiment.

FIG. 8 is the flow chart of the manufacturing process steps for thesemiconductor device of this invention according to the fifthembodiment.

FIG. 9 is the flow chart of the manufacturing process steps for thesemiconductor device of this invention according to the sixthembodiment.

Common reference numerals are used throughout the drawings and thedetailed description to indicate the same elements. The presentinvention will be more apparent from the following detailed descriptiontaken in conjunction with the accompanying drawings.

DESCRIPTION OF EMBODIMENTS

The semiconductor device of this invention is, for example, amulti-junction photodiode, and a plurality of multi-junction photodiodestructures are arranged in an array on the substrate. In general,through the design of specific stacked structures, various depth of thejunction structures and modifying the doping concentration of thejunctions/layers, the multi-junction photodiode is formed with at leastthe following capabilities: (1) capability of discriminating light ofvarious wavelength, (2) high detection sensitivity and (3) low noise(such as low dark currents). In addition, due to the design of themulti-junction, the photodiode of this invention when applied in theCMOS image sensors can discriminate light of various wavelength, usefulfor the assortment of sensing wavelength for the conventional CMOS imagesensor, enhancing the detection sensitivity and reducing the darkcurrents. Hence, such highly sensitive sensor can be widely used invarious detection applications, including molecular detection anddiscrimination.

Later on, cross-sectional views are provided to illustrate theembodiments of this invention. It is noted that p type is the firstconductive type and n type is the second conductive type in thefollowing embodiment(s). However, such design is not meant to limit thescope of the present invention. It is also feasible to assign the firstconductive type as the n type and the second conductive type as the ptype to form the semiconductor device of this invention.

First Embodiment

FIG. 1A is a schematic top view of the semiconductor device of thisinvention according to the first embodiment. FIG. 1B is across-sectional view of FIG. 1A along the line I-I′. For descriptionpurposes, merely the main layout of the photodiode is illustrated inFIG. 1A, while certain elements may be omitted for the convenience ofexplanation.

Referring to FIGS. 1A and 1B, the semiconductor device 100 is, forexample, a multi-junction photodiode for detecting light of variouswavelength. The semiconductor device 100 includes a substrate 102 havingthe first conductive type dopants, an epitaxy layer 104 having the firstconductive type dopants, a deep well region 106 having the secondconductive type dopants, a well region 108 having the first conductivetype dopants, a well region 110 having the second conductive typedopants, a well region 112 having the first conductive type dopants anda doped region 114 having the second conductive type dopants.

The substrate 102 having the first conductive type dopants is, forexample, a p+ type substrate (p+ sub), which is a silicon substrate orother semiconductor substrate. In the first embodiment, the implanteddopants in the p+ type substrate 102 are boron, with a dopingconcentration, for example, of about 1×10¹⁹ atoms/cm³˜1×10²¹ atoms/cm³.

The epitaxy layer 104 having the first conductive type dopants isdisposed on the substrate 102. The epitaxy layer 104 is, for example, ap− type lightly doped epitaxy silicon layer (epi p−). In the firstembodiment, the implanted dopants in the p− type epitaxy layer 104 areboron, with a doping concentration, for example, of about 1×10¹⁵atoms/cm³˜5×10¹⁶ atoms/cm³. In addition, the epitaxy layer 104 grown onthe substrate 102 has a thickness of about 4 μm˜7 μm, for example.

The deep well region 106 having the second conductive type dopants isdisposed in the epitaxy layer 104 and is, for example, an n type deepwell region. In the first embodiment, the implanted dopants in the ntype deep well region 106 are phosphorus, with a doping concentration,for example, of about 1×10¹⁶ atoms/cm³˜1×10¹⁷ atoms/cm³. In addition,the deep well region 106 has a distribution range from the top surfaceof the epitaxy layer 104 extending down to a depth of about 3 μm˜4.5 μm.

The well region 108 having the first conductive type dopants is disposedin the deep well region 106 and is, for example, a p type well region.In the first embodiment, the implanted dopants in the p type well region108 are boron, with a doping concentration, for example, of about 5×10¹⁶atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the well region 108 has adistribution range from the top surface of the epitaxy layer 104extending down to a depth of about 2.5 μm to 3.2 μm, and three sides arein contact with the epitaxy layer.

The well region 110 having the second conductive type dopants isdisposed in the well region 108 and is, for example, an n type wellregion. In the first embodiment, the dopants implanted in the n typewell region 110 are phosphorus, with a doping concentration, forexample, of about 1×10¹⁶ atoms/cm³ to 1×10¹⁷ atoms/cm³. In addition, thewell region 110 has a distribution range from the top surface of theepitaxy layer 104 extending down to a depth of about 1.8 μm to 2.3 μm.

The well region 112 having the first conductive type dopants is disposedin the well region 110 and three sides of the well region 112 are incontact with the epitaxy layer. The well region 112, is, for example, ap type well region. In the first embodiment, the dopants implanted inthe p type well region 112 are boron, with a doping concentration, forexample, of about 5×10¹⁶ atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, thewell region 112 has a distribution range from the top surface of theepitaxy layer 104 extending down to a depth of about 1.2 μm to 1.7 μm.

The doped region 114 having the second conductive type dopants isdisposed in the well region 112 and is, for example, an n type dopedregion. In the first embodiment, the dopants implanted in the n typedoped region 114 are phosphorus, with a doping concentration, forexample, of about 1×10¹⁶ atoms/cm³ to 1×10¹⁷ atoms/cm³. In addition, thedoped region 114 has a distribution range from the top surface of theepitaxy layer 104 extending down to a depth of about 0.5 μm to 0.8 μm.

In the first embodiment, as shown in FIGS. 1A and 1B, in the 3D point ofview, the three sides of the well region 108 are, for example, incontact with the epitaxy layer 104, the deep well region 106 forms anL-shaped structure; the three sides of the well region 112 are, forexample, in contact with the epitaxy layer 104 and the well region 110forms an L-shaped structure. The L-shaped structures of the above deepwell region 106 and the well region 110 can be rotated to any anglealong the axis of epitaxy depth, and are not limited to the directionspecified in FIGS. 1A and 1B. Because there are plural p-n junctionsformed between the epitaxy layer 104, the deep well region 106, the wellregion 108, the well region 110, the well region 112 and the dopedregion 114, a multi junction photodiode structure is obtained, which iscapable of sensing light of various wavelength.

Different light wavelengths have different penetration depths in thesilicon substrate. For example, the penetration depth is 0.91 μm forlight wavelength of 500 nm, 2.42 μm for wavelength of 600 nm, and 5.26μm for wavelength of 700 nm. Therefore, the multi-junction photodiodefabricated by the general CMOS logic processes in combination with theback-end circuit design can achieve multiple wavelength detection basedon the light absorption properties of silicon.

Specifically speaking, in the semiconductor device 100, the doped region114 surrounded by the well region 112 forms the first photodiode, theL-shaped region 110 surrounded by the epitaxy layer 104, the well region108 and the well region 112 forms the second photodiode, and theL-shaped deep well region 106 surrounded by the epitaxy layer 104, thewell region 108 forms the third photodiode. That is, the multi junctionphotodiode structure constituted by the doped region 114, the wellregion 112, the well region 110, the well region 108, the deep wellregion 106 and the epitaxy layer 104 can detect the short wavelength ofabout 450 nm to 550 nm, the middle wavelength of about 550 nm to 650 nmand the long wavelength of about 650 nm to 800 nm respectively in thefirst, second, and third junction, thus improving the sensitivity, whencompared with conventional CMOS image sensor using the color filter.

In order to increase the conductivity of the photodiode, within the wellregion 110 having the second conductive type dopants, the well region116 of the same conductive type is optionally set, and within the deepwell region 106 having the second conductive type dopants, the wellregion 118 of the same conductive type is optionally set. The wellregion 116 having the second conductive type dopants is, for example, ann type well region. The doping concentration of the well region 116 ishigher than that of the well region 110, so as to function as theterminal of the well region 110 for outer connection. In the firstembodiment, the dopants implanted in the n type well region 116 arephosphorus, with a doping concentration, for example, of about 5×10¹⁶atoms/cm³ to 5×10¹⁷ atoms/cm³. In addition, the well region 116 has adistribution range from the top surface of the epitaxy layer 104extending down to a depth of about 0.5 μm˜1.5 μm.

The well region 118 having the second conductive type dopants is, forexample, an n type well region. The doping concentration of the wellregion 118 is higher than that of the deep well region 106, so as tofunction as the terminal of the deep well region 106 for outerconnection. In the first embodiment, the dopants implanted in the n typewell region 118 are phosphorus, with a doping concentration, forexample, of about 5×10¹⁶ atoms/cm³ to 5×10¹⁷ atoms/cm³. In addition, thewell region 118 has a distribution range from the top surface of theepitaxy layer 104 extending down to a depth of about 1.5 μm to 2.5 μm.

In addition, in the first embodiment, the well region 120 having thefirst conductive type dopants is optionally set in the semiconductordevice 100 for the reference voltage. Optionally, the well region 122having the second conductive type dopants and the doped region 124having the first conductive type dopants may be set. The well region 120and the well region 122 are set in the epitaxy layer 104, for example,outside the edge of the deep well region 106, while the doped region 124is, for example, disposed on top of the deep well region 106.

In details, the well region 120 having the first conductive type dopantsis, for example, a p type well region. The well region 120 is, forexample, ring-shaped surrounding without contacting with the deep wellregion 106. In the first embodiment, the dopants implanted in the p typewell region 120 are boron, with a doping concentration, for example, ofabout 1×10¹⁷ atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the well region120 has a distribution range from the top surface of the epitaxy layer104 extending down to a depth of about 1.0 μm to 2.0 p.m.

The well region 122 having the second conductive type dopants is, forexample, an n type well region. The well region 122 is, for example,ring-shaped surrounding but without contacting with the well region 120.In the first embodiment, the dopants implanted in the n type well region122 are phosphorus, with a doping concentration, for example, of about1×10¹⁷ atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the well region 120has a distribution range from the top surface of the epitaxy layer 104extending down to a depth of about 2 μm to 4 μm.

The doped region 124 having the first conductive type dopants is, forexample, a p type (p+) doped region. The doped region 124 is, forexample, located within the area defined by the ring-shaped well region120, and spans over the whole area of the deep well region 106. Thedoped region 124 is disposed on the deep well region 106, the wellregion 108, the well region 110, the well region 112, the doped region114, the well region 116 and the well region 118. In the firstembodiment, the dopants implanted in the p type doped region 124 areboron, with a doping concentration, for example, of about 1×10¹⁸atoms/cm³ to 1×10²¹ atoms/cm³. In addition, the doped region 124 has adistribution range from the top surface of the epitaxy layer 104extending down to a depth of about 0.2 μm to 0.5 μm.

Because there are the well region 120, the well region 122 and the dopedregion 124 of higher doping concentrations surrounding the periphery ofthe photodiode, the well region 120 and the well region 122 can avoidnoise impact from outer circuits and cross-talk from the adjacentphotodiodes, and lower the internal dark current of the photodiode. Thedoped region 124 can avoid carrier diffusion to the outside, and lowerthe dark current by isolating the surface defects resulting from theprocesses. Hence, through the design of the well region 120, the wellregion 122 and the doped region 124, the device efficiency is enhancedby reducing noises, blocking the leaking current, and lowering the darkcurrents.

In the first embodiment, the semiconductor device 100 further includes aplurality of contacts, respectively disposed on the doped region 114,the well region 116, the well region 118, the well region 120 and thewell region 122, for electrically connecting to the outer circuits. Thematerial of the contact 126 is, for example, a metal or other conductivematerials, or the contact 126 is a heavily doped region. In thisembodiment, when the semiconductor device 100 has the doped region 124spanning over the whole deep well region 106, the doped region 124further includes a plurality of openings 124 a, disposed on the dopedregion 114, the well region 116, and the well region 118, to facilitatethe formation of the contacts 126.

Second Embodiment

FIG. 2 is a schematic cross-sectional view of the semiconductor deviceof this invention according to the second embodiment. In FIG. 2, thesame elements used in FIG. 1B are designated with the same referencenumbers, and the detailed descriptions may be omitted.

Referring to FIG. 2, the semiconductor device 200 is, for example, amulti junction photodiode for detecting light of various wavelength. Themain elements of the semiconductor device 200 of FIG. 2 aresubstantially similar to those elements of the semiconductor device 100of FIGS. 1A and 1B, while the differences mainly lie in the arrangementof the photodiode. The semiconductor device 200 includes the substrate102 having the first conductive type dopants, the epitaxy layer 104having the first conductive type dopants, the deep well region 106having the second conductive type dopants, the layer region 202 havingthe first conductive type dopants, the layer region 204 having the firstconductive type dopants, the layer region 206 having the firstconductive type dopants, the layer region 208 having the firstconductive type dopants and the layer region 210 having the firstconductive type dopants.

The layer region 202 having the first conductive type dopants isdisposed in the deep well region 106 and is, for example, a p type layerregion. In the first embodiment, the dopants implanted in the p typeregion 202 are boron, with a doping concentration, for example, of about5×10¹⁶ atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the layer region 202has a distribution range from a depth below the top surface of theepitaxy layer 104 of about 1.8 μm to 2.3 μm to a depth below the topsurface of the epitaxy layer 104 of about 2.5 μm to 3.2 μm.

The layer region 204 having the first conductive type dopants isdisposed in the deep well region 106 and is, for example, a p type layerregion. The layer region 204 is disposed above the layer region 202, butthe layer region 204 and the layer region 202 are, for example,unconnected to each other. In the second embodiment, the dopantsimplanted in the p type region 204 are boron, with a dopingconcentration, for example, of about 5×10¹⁶ atoms/cm³ to 8×10¹⁷atoms/cm³. In addition, the layer region 204 has a distribution rangefrom a depth below the top surface of the epitaxy layer 104 of about 0.5μm to 0.8 μm to a depth below the top surface of the epitaxy layer 104of about 1.2 μm to 1.7 μm.

The layer region 206 and the layer region 208 having the firstconductive type dopants are disposed in the deep well region 106 andare, for example, p type layer regions. The layer region 206 and thelayer region 208 are located above the layer region 202, and the layerregion 206 is located between the layer region 208 and the layer region202. The layer region 208, the layer region 206 and the layer region 202are, for example, connected, so that the layer region 208 and the layerregion 206 form an upright structure to connect the layer region 202 tothe top surface of the epitaxy layer 104. In the second embodiment, thedopants implanted in the p type layer region 206 and the layer region208 are boron, with a doping concentration, for example, of about 5×10¹⁶atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the layer region 206 has adistribution range from a depth below the top surface of the epitaxylayer 104 of about 1.2 μm to 1.7 μm to a depth below the top surface ofthe epitaxy layer 104 of about 1.8 μm to 2.3 μm, and the layer region208 has a distribution range from the top surface of the epitaxy layer104 extending down to a depth of about 1.2 μm to 1.7 μm.

The layer region 210 having the first conductive type dopants isdisposed in the deep well region 106 and is, for example, a p type layerregion. The layer region 210 is located above the layer region 204 andconnected to the layer region 204 to connect the layer region 210 to thetop surface of the epitaxy layer 104. In addition, the layer region 210and the layer regions 208, 206 are, for example, unconnected. In thesecond embodiment, the dopants implanted in the p type doped region 210are boron, with a doping concentration, for example, of about 5×10¹⁶atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the layer region 210 has adistribution range from the top surface of the epitaxy layer 104extending down to a depth of about 1.0 μM to 2.0 μm. The distributionrange can be modified for the best performance.

In the second embodiment, in the 3D point of view, three sides of thelayer region 202 are, for example, in contact with the epitaxy layer104, and three sides of the layer region 204 are, for example, incontact with the epitaxy layer 104. Additionally, the layer regions 206,208 and the layer region 210 are not necessarily located on the sameside. As long as three photodiodes are foiined and connected to the topsurface of the epitaxy layer 104, the scopes of the present inventionare not limited to the examples described herein.

In FIG. 2, the layer region 202, the layer region 204, the layer region206, the layer region 208 and/or the layer region 210 and/or the dopedregion 211 disposed in the deep well region 106 divide the deep wellregion 106 into a plurality of regions. There are a plurality of p-njunctions between these regions, and the photodiode structure having themultiple junctions is formed. Specifically speaking, for thesemiconductor device 200, the deep well region 106 or the doped region211 surrounded by the epitaxy layer 104, the layer region 204 and thelayer region 210 forms the first photodiode, the L-shaped deep wellregion 106 surrounded by the layer region 202, the layer region 204, thelayer region 206, the layer region 208, the layer region 210 and theepitaxy layer 104 forms the second photodiode, and the L-shaped deepwell region 106 surrounded by the epitaxy layer 104, the layer region202, the layer region 206 and the layer region 208 forms the thirdphotodiode. Hence, the multi-junction photodiode structure can detectlight of various wavelength, thus achieving wavelength discrimination.

In addition, in order to increase the conductivity of the photodiode,within the deep well region 106 having the second conductive typedopants, it is optional to set the well region 212 and the well region214 of the same conductive type. The doping concentrations of the wellregion 212 and the well region 214 are higher than that of the deep wellregion 106, so that the well region 212 and the well region 214 functionas the terminals for outer connection for deep well region 106. Thedoped region 211 is, for example, an n type doped region and is disposedin the deep well region 106 above the layer region 204. That is, thedoped region 211 is located within the range defined by the layer region204 and the layer region 210. The well region 212 is, for example, an ntype well region and is disposed in the deep well region 106 above thelayer region 202 and between the layer region 208 and the layer region210. The well region 214 is, for example, an n type well region. Thewell region 214 is disposed in the deep well region 106 defined by thelayer regions 202, 206, 208 and the epitaxy layer 104 and between thelayer region 208 and the well region 120. The dopants, the dopingconcentration, and the distribution coverage of the doped region 211are, for example, similar to or the same as those of the doped region114 in the first embodiment. The dopants, the doping concentration, andthe distribution coverage of the well region 212 are, for example,similar to or the same as those of the well region 116 in the firstembodiment. The dopants, the doping concentration, and the distributioncoverage of the well region 214 are, for example, similar to or the sameas those of the well region 118 in the first embodiment.

In the second embodiment, for the semiconductor device 200, it isoptional to set the well region 120 having the first conductive typedopants, the well region 122 having the second conductive type dopants,and the doped region 124 having the first conductive type dopants, inorder to block the leaking current path to reduce the dark current andimprove the device performance. In addition, the semiconductor device200 further includes a plurality of the contact 126, respectivelydisposed on the deep well region 106 (or the doped region 211) above thelayer region 204, and on the well region 212, the well region 214, thewell region 120 and the well region 122, for electrical connection toouter circuits. The modification and application based on the previousembodiments are well known to the artisans in this field and will not beexplained in details herein.

Third Embodiment

FIG. 3 is a schematic cross-sectional view of the semiconductor deviceof this invention according to the third embodiment. In FIG. 3, the sameelements used in FIG. 2 are designated with the same reference numbersand the detailed descriptions may be omitted.

Referring to FIG. 3, the semiconductor device 300 is, for example, amulti-junction photodiode for detecting light of various wavelength. Themain elements of the semiconductor device 300 of FIG. 3 aresubstantially similar to those elements of the semiconductor device 200of FIG. 2, while the differences mainly lie in the arrangement of thephotodiode. The semiconductor device 300 includes the substrate 102having the first conductive type dopants, the epitaxy layer 104 havingthe first conductive type dopants, the deep well region 106 having thesecond conductive type dopants, the layer region 202 having the firstconductive type dopants, the layer region 206 having the firstconductive type dopants, the layer region 208 having the firstconductive type dopants, the well region 302 having the first conductivetype dopants and the doped region 304 having the second conductive typedopants.

The well region 302 having the first conductive type dopants is disposedin the deep well region 106 and is, for example, a p type well region.The well region 302 is located above the layer region 202, and the wellregion 302 is unconnected to the layer regions 202, 206, 208, forexample. In the third embodiment, the dopants implanted in the p typewell region 302 are boron, with a doping concentration, for example, ofabout 5×10¹⁶ atoms/cm³ to 8×10¹⁷ atoms/cm³. In addition, the well region302 has a distribution range from the top surface of the epitaxy layer104 extending down to a depth of about 1.2 μm to 1.7 μm.

The doped region 304 having the second conductive type dopants isdisposed in the well region 302 and is, for example, an n type dopedregion. In the third embodiment, the dopants implanted in the n typedoped region 304 are phosphorus, with a doping concentration, forexample, of about 1×10¹⁶ atoms/cm³ to 1×10¹⁷ atoms/cm³. In addition, thedoped region 304 has a distribution range from the top surface of theepitaxy layer 104 extending down to a depth of about 0.5 μm to 0.8 μm.

In the third embodiment, in the 3D point of view, three sides of thelayer region 202 are, for example, in contact with the epitaxy layer104, and three sides of the well region 302 are, for example, in contactwith the epitaxy layer 104. In FIG. 3, because of the foimation of thelayer region 202, the layer region 206, the layer region 208, the wellregion 302 and the doped region 304 in the deep well region 106, thereare plural p-n junctions between these regions and the multi junctionphotodiode is formed.

Specifically speaking, for the semiconductor device 300, the dopedregion 304 surrounded by the well region 302 forms the first photodiode,the L-shaped deep well region 106 that is surrounded by the layer region202, the layer region 206, the layer region 208, the well region 302 andthe epitaxy layer 104 fonns the second photodiode, and the L-shaped deepwell region 106 that is surrounded by the epitaxy layer 104, the layerregion 202, the layer region 206 and the layer region 208 foil is thethird photodiode. Hence, the multi-junction photodiode structure candetect light of various wavelength, thus achieving wavelengthdiscrimination.

In addition, the semiconductor device 300 further includes a pluralityof the contact 126, respectively disposed on the doped region 304, thewell region 212, the well region 214, the well region 120 and the wellregion 122

, for electrically connected to the outer circuits.

The semiconductor devices 100, 200, 300 described in the first, secondand third embodiments are multi-junction photodiodes, which are able todetect light of multiple wavelength and widely applicable for variousdetection. For example, based on the biochemical standards ofsingle-molecule sequencing of genome, the sensor is required to have thesensitivity of detecting less than 300 photons within the integratedtime (≤33 ms) for single-molecule sequencing of genome. The multijunction photodiode is required to have low dark current and highsensitivity. The multi-junction photodiode of this invention fulfillssuch requirements, and the assorting capability of multiple wavelengthcan be employed for single-molecule fluorescence detection ofbiochemical reactions. However, the applications of the device of thisinvention are not limited to the embodiments.

The fabrication processes for the semiconductor devices 100, 200, 300 asshown in FIGS. 1B, 2 and 3 are described as follows. However, as theartisan would understand, the fabrication processes provided herein areused to describe the manufacturing of the semiconductor device of thisinvention compatible with the current CMOS logic processes, but are notmeant to limit the scopes of the present invention. The fabricationprocesses for the semiconductor devices are not limited to the sequenceof the steps described in the embodiments and modifications can be madeaccording to the technology or product requirements.

Fourth Embodiment

FIGS. 4A-4C are schematic cross-sectional view showing the fabricationprocess steps for the semiconductor device of this invention accordingto the fourth embodiment. In FIGS. 4A to 4C, the same elements used inFIG. 1B are designated with the same reference numbers and the detaileddescriptions may be omitted. FIG. 7 is the flow chart of the fabricationprocess steps for the semiconductor device of this invention accordingto the fourth embodiment.

Referring to FIGS. 4A and 7, in Step S702, the substrate 102 having thefirst conductive type dopants is provided and the substrate 102 is, forexample, a p+ type silicon substrate or other semiconductor substrate.In Step S704, the epitaxy layer 104 having the first conductive typedopants is formed on the substrate 102 and is, for example, a p typelightly boron doped epitaxy layer. The epitaxy layer 104 can be formedby the epitaxy process to form an epitaxy silicon layer on the surfaceof the substrate 102. In Step S706, the deep well region 106 having thesecond conductive type dopants is formed in the epitaxy layer 104 andis, for example, an n type deep well region. In the fourth embodiment,the deep well region 106 can be formed in the epitaxy layer 104 throughone or more phosphorus ion implantation process with an implantationenergy, for example, of about 1600 keV to 2200 keV.

Referring to FIGS. 4B and 7, in Step S708, the well region 108 havingthe first conductive type dopants is formed in the deep well region 106and is, for example, a p type well region. In the fourth embodiment,boron ions are implanted through one or more ion implantation processinto the deep well region 106 to form the well region 108 with animplantation energy, for example, of about 1050 keV to 1600 keV. In StepS710, the well region 110 having the second conductive type dopants isformed in the well region 108 and is, for example, an n type wellregion. In the fourth embodiment, phosphorus ions are implanted throughone or more ion implantation process into the well region 108 to formthe well region 110 with an implantation energy, for example, of about1400 keV to 2000 keV.

In Step S712, the well region 112 having the first conductive typedopants is formed in the well region 110 and is, for example, a p typewell region. In the fourth embodiment, boron ions are implanted throughone or more ion implantation process into the well region 110 to formthe well region 112 with an implantation energy, for example, of about300 keV to 550 keV. In Step S714, the doped region 114 having the secondconductive type dopants is formed in the well region 112 and is, forexample, an n type doped region. In the fourth embodiment, phosphorusions are implanted by ion implantation into the upper part of the wellregion 112 to form the doped region 114 with an implantation energy, forexample, of about 200 keV to 500 keV.

Referring to FIGS. 4C and 7, it is optional to form the well region 116having the second conductive type dopants in the well region 110 (StepS716), and to form the well region 118 having the second conductive typedopants in the deep well region 106 (Step S718). The well region 116 andthe well region 118 are, for example, the n type well regions of higherdoping concentrations, respectively functioning as the terminals of thewell region 110 and the well region 106 for outer connections. In thefourth embodiment, phosphorus ions are implanted by ion implantationinto upper parts of the well region 110 and the deep well region 106 torespectively form the well region 116 and the well region 118 with animplantation energy, for example, of about 200 keV to 500 keV. Inaddition, the well region 116 and the well region 118 can be formed inthe same step or separately in different steps.

Later, it is optional to form the well region 120 having the firstconductive type dopants (Step S720) and the well region 122 having thesecond conductive type dopants (Step S722) in the epitaxy layer 104, andto form the doped region 124 having the first conductive type dopants(Step S724) in the deep well region 106. The well region 120 is, forexample, the p type well region, and is ring-shaped surrounding the deepwell region 106. In the fourth embodiment, boron ions are implanted byion implantation into upper parts of the epitaxy layer 104 and outsidethe deep well region 106 to form the well region 120 with animplantation energy, for example, of about 250 keV to 350 keV. The wellregion 122 is, for example, on n type well region and is ring-shapedsurrounding the well region 120. In the fourth embodiment, phosphorusions are implanted by ion implantation into the upper part of theepitaxy layer 104 and outside the well region 120 to form the wellregion 122 with an implantation energy, for example, of about 350 keV to550 keV. The doped region 124 is, for example, a p type doped region andis formed within the range defined by the ring-shaped well region 120and spans over the upper part of the whole deep well region 106. In thefourth embodiment, boron ions are implanted by ion implantation into theupper part of the deep well region 106 to form the doped region 124 withan implantation energy, for example, of about 10 keV to 45 keV.

Step S726, a plurality of contact 126 is formed in the doped region 114,the well region 116, the well region 118, the well region 120, and thewell region 122, for electrically connecting to the outer circuits.Thus, the semiconductor device 100 as shown in FIGS. 1A and 1B isobtained.

Fifth Embodiment

FIGS. 5A to 5C are schematic cross-sectional view showing thefabrication process steps for the semiconductor device of this inventionaccording to the fifth embodiment. In FIGS. 5A to 5C, the same elementsused in FIG. 2 are designated with the same reference numbers, and thedetailed descriptions may be omitted. FIG. 8 is the flow chart of thefabrication process steps for the semiconductor device of this inventionaccording to the fifth embodiment.

Referring to FIGS. 5A and 8, after the formation of the deep well region106 (Step S706), Step S802 is followed. The layer region 202 having thefirst conductive type dopants is formed in the deep well region 106. Thelayer region 202, is, for example, a p type well region. In the fifthembodiment, boron ions are implanted into the deep well region 106 toform the layer region 202 with an implantation energy, for example, ofabout 1050 keV to 1600 keV. Step S804, the layer region 204 having thefirst conductive type dopants is formed in the deep well region 106 andis, for example, a p type well region. It is noted that the layer region202 and the layer region 204 in the deep well region 106 do not reachthe upper surface of the epitaxy layer 104, and the layer region 204 andthe below layer region 202 are unconnected to each other. In the fifthembodiment, boron ions are implanted by ion implantation into the deepwell region 106 to form the layer region 204 with an implantationenergy, for example, of about 300 keV˜550 keV.

Referring to FIGS. 5B and 8, in Step S806, the layer region 206 and thelayer region 208 having the first conductive type dopants aresequentially framed in the deep well region 106. The layer region 206and the layer region 208 having the first conductive type dopants are,for example, p type layer regions. The layer region 206 and the layerregion 208 are, for example, vertical to and above the layer region 202,and the layer region 206 and the layer region 208 are connected to eachother. Hence, the layer region 202 is connected to the top surface ofthe epitaxy layer 104 through the layer region 208 and the layer region206. In the fifth embodiment, boron ions are implanted into the deepwell region 106 to sequentially form the layer region 206 and the layerregion 208 with an implantation energy, for example, of about 300 keV to900 keV.

In Step S808, the layer region 210 having the first conductive typedopants is formed in the deep well region 106 and is, for example, a ptype layer region. The layer region 210 is, for example, formed aboveand connected to the layer region 204, so that the layer region 204 isconnected to the top surface of the epitaxy layer 104 through the layerregion 210. In the fifth embodiment, boron ions are implanted into thedeep well region 106 to form the layer region 210 with an implantationenergy, for example, of about 300 keV to 500 keV. Later, it is optionalto form the well region 120 having the first conductive type dopants(Step S810) and the well region 122 having the second conductive typedopants (Step S812) in the epitaxy layer 104. The well region 120 is,for example, a p type well region and is ring-shaped surrounding thedeep well region 106. The well region 122 is, for example, an n typewell region and is ring-shaped surrounding the well region 120. The wellregion 120 and the well region 122 can be formed according to theafore-mentioned steps and will not be detailed herein.

Referring to FIGS. 5C and 8, in Step S814, it is optional to form thedoped region 211 having the second conductive type dopants in the upperpart of the deep well region 106. The doped region 211 is, for example,an n type doped region of a higher doping concentration for betterdesign flexibility. The doped region 211 is located within the rangedefine by the layer region 204 and the layer region 210, for example. InStep S816, it is optional to form the well region 212 and the wellregion 214 having the second conductive type dopants in the deep wellregion 106. The well region 212 and the well region 214 are, forexample, n type well regions of higher doping concentrations to increaseconductivity as the terminals of the deep well region 106 for outerconnections. The well region 212 is, for example, located above thelayer region 202 and between the layer region 208 and the layer region210. The well region 214 is, for example, located within the areadefined by the layer regions 202, 206, 208 and the epitaxy layer 104,and located between the layer region 208 and the well region 120. In thefifth embodiment, phosphorus ions are implanted by ion implantation intothe upper part of the deep well region 106 to form the well region 212and the well region 214 with an implantation energy, for example, ofabout 200 keV to 500 keV. The well region 212 and the well region 214can be formed in the same step or separately in different steps.

Later, after optional formation of the doped region 124 having the firstconductive type dopants in the deep well region 106 (Step S818), StepS820 is performed to form a plurality of contacts 126 on the deep wellregion 106 that is above the layer region 204 (i.e. the doped region211), the well region 212, the well region 214, the well region 120 andthe well region 122. The semiconductor device 200 as shown in FIG. 2 isobtained.

Sixth Embodiment

FIGS. 6A-6C are schematic cross-sectional view showing the fabricationprocess steps for the semiconductor device of this invention accordingto the sixth embodiment. In FIGS. 6A to 6C, the same elements used inFIG. 3 are designated with the same reference numbers and the detaileddescriptions may be omitted. FIG. 6A shows the process steps followingthe steps of FIG. 4A in the fourth embodiment. FIG. 9 is the flow chartof the fabrication process steps for the semiconductor device of thisinvention according to the sixth embodiment.

Referring to FIGS. 6A and 9, after formation of the deep well region 106(Step S706), Step S902 is performed to form the layer region 202 havingthe first conductive type dopants in the deep well region 106. The layerregion 202, is, for example, the p type layer region. In Step S904, thelayer region 206 and the layer region 208 having the first conductivetype dopants are sequentially formed in the deep well region 106. Thelayer region 206 and the layer region 208 are, for example, p type wellregions. The layer region 206 and the layer region 208 are vertical toand above the layer region 202, for example, so that the layer region202 is connected to the top surface of the epitaxy layer 104 through theupright structure of the layer region 208 and the layer region 206.

Referring to FIGS. 6B and 9, in Step S906, the well region 302 havingthe first conductive type dopants is formed in the deep well region 106.The well region 302, is, for example, a p type well region. The wellregion 302 in the deep well region 106 is located above the layer region202 and reaches to the top surface of the epitaxy layer 104. In thesixth embodiment, boron ions are implanted into the deep well region 106to form the well region 302 with an implantation energy, for example, ofabout 300 keV to 550 keV. In Step S908, the doped region 304 having thesecond conductive type dopants is formed in the well region 302 and is,for example, an n type doped region. In the sixth embodiment, phosphorusions are implanted by ion implantation into the upper part of the wellregion 302 to form the doped region 304 with an implantation energy, forexample, of about 200 keV to 500 keV. Later, the well region 120 havingthe first conductive type dopants (Step S910) and the well region 122having the second conductive type dopants (S912) are optionally formedin the epitaxy layer 104. The well region 120 and the well region 122can be formed according to the afore-mentioned steps and will not bedetailed herein.

Referring to FIGS. 6C and 9, in Step S914, it is optional to form thewell region 212 and the well region 214 having the second conductivetype dopants in the deep well region 106. The well region 212 and thewell region 214 are, for example, n type well regions of higher dopingconcentrations to increase conductivity, as terminals of the deep wellregion 106 for outer connections. The well region 212 is, for example,located above the layer region 202 and between the layer region 208 andthe well region 302. The well region 214 is, for example, located withinthe area defined by the layer regions 202, 206, 208 and the epitaxylayer 104 and between the layer region 208 and the well region 120.

Later, after optional formation of the doped region 124 having the firstconductive type dopants in the deep well region 106 (Step S916), StepS918 is performed to form a plurality of the contacts 126 on the dopedregion 304, the well region 212, the well region 214, the well region120 and the well region 122. The semiconductor device 300 as shown inFIG. 3 is obtained.

It is noted that several ion implantation processes are employedaccording to the fourth, fifth and sixth embodiments to implant thedopants into the epitaxy layer 102 to form the multi junctionphotodiode, which is able to detect light of various wavelength. The ionimplantation processes can be accomplished by the CMOS logic processesand are compatible with the current semiconductor processes in masklayout. However, the above fabrication processes are not limited to theCMOS logic processes and the sequence of the process steps can bemodified.

In conclusion, by arranging the well regions, the layer regions and thedoped regions in the epitaxy layer, the multi junction photodiode(s) isformed in the semiconductor device of this invention, thus offeringwavelength discrimination. In addition, the semiconductor device of thisinvention can provide low dark current and high sensitivity for variousdetection applications.

Furthermore, the fabrication processes of the semiconductor device ofthis invention can be integrated with the current CMOS logic processes,so that the multi-junction photodiodes can be formed with the CMOS logicdevices at the same time, thus simplifying the fabrication withoutincreasing the production costs.

While the invention has been described and illustrated with reference tospecific embodiments thereof, these descriptions and illustrations donot limit the invention. It should be understood by those skilled in theart that various changes may be made and equivalents may be substitutedwithout departing from the true spirit and scope of the invention asdefined by the appended claims. The illustrations may not be necessarilybeing drawn to scale. It will be apparent to those skilled in the artthat various modifications and variations can be made to the structureof the present invention without departing from the scope or spirit ofthe invention. In view of the foregoing, it is intended that the presentinvention cover modifications and variations of this invention providedthey fall within the scope of the following claims and theirequivalents.

What is claimed is:
 1. A semiconductor device, comprising: a substratehaving first conductive type dopants; an epitaxy layer, disposed on thesubstrate and having the first conductive type dopants; a multi-junctionphotodiode structure disposed in the epitaxial layer on the substrate,wherein the multi-junction photodiode structure comprises a sixth wellregion having the first conductive type dopants and disposed in a deepwell region and three sides of the sixth well region are in contact withthe epitaxy layer; a first well region, having the first conductive typedopants, disposed in the epitaxy layer and distributed from a topsurface of the epitaxial layer to a first depth shorter than a seconddepth of the multi-junction photodiode, wherein the first well region isring-shaped and surrounds a periphery of the multi-junction photodiode;and a ring-shaped second well region disposed in the epitaxy layer andoutside an edge of the first well region to surround but not in contactwith the first well region.
 2. The semiconductor device of claim 1,wherein the second well region having second conductive type dopants. 3.The semiconductor device of claim 1, further comprising a first dopedregion having the first conductive type dopants disposed in an upperpart of a deep well region of the multi-junction photodiode structure,wherein the first doped region is located within an area defined by thering-shaped first well region and spans over the whole area of a deepwell region.
 4. The semiconductor device of claim 3, wherein themulti-junction photodiode structure comprises at least a third wellregion having the second conductive type dopants disposed in a fourthwell region, wherein the third well region has a doping concentrationlarger than that of a deep well region, and the third well regionfunction as a terminal of the fourth well region for outer connection.5. The semiconductor device of claim 1, wherein the multi-junctionphotodiode structure comprises at least a fifth well region having thesecond conductive type dopants disposed in a deep well region, whereinthe fifth well region has a doping concentration larger than that of thedeep well region, and the fifth well region function as a terminal ofthe deep well region for outer connection.
 6. The semiconductor deviceof claim 1, wherein the multi-junction photodiode structure comprise adeep well region having second conductive type dopants, disposed in theepitaxy layer, and having a doping concentration of 1×10¹⁶ atoms/cm³ to1×10¹⁷ atoms/cm³.
 7. The semiconductor device of claim 1, wherein themulti-junction photodiode structure comprise a deep well region, and thedeep well region has a distribution range from the top surface of theepitaxy layer extending down to a depth of about 3 μm to 4.5 μm.
 8. Thesemiconductor device of claim 1, wherein the sixth well region have adoping concentration of 5×10¹⁶ atoms/cm³ to 8×10¹⁷ atoms/cm³.
 9. Thesemiconductor device of claim 1, wherein the sixth well region has adistribution range from the top surface of the epitaxy layer extendingdown to a depth of about 2.5 μm to 3.2 μm.
 10. The semiconductor deviceof claim 1, wherein the multi-junction photodiode structure comprises aseventh well region having the first conductive type dopants disposed ina deep well region.
 11. The semiconductor device of claim 10, whereinthe seventh well region has a distribution range from the top surface ofthe epitaxy layer extending down to a depth of about 1.2 μm to 1.7 μm.12. The semiconductor device of claim 10, wherein the seventh wellregion having a doping concentration of 5×10¹⁶ atoms/cm³ to 8×10¹⁷atoms/cm³.
 13. The semiconductor device of claim 10, wherein three sidesof the seventh well region are in contact with the epitaxy layer. 14.The semiconductor device of claim 1, wherein the multi-junctionphotodiode structure further comprises a first layer region and a thirdlayer region having the first conductive type dopants, disposed in adeep well region, and the third layer region is located above the firstlayer region to connect the first layer region to a top surface of theepitaxy layer.
 15. The semiconductor device of claim 14, furthercomprising a second layer region and a fourth layer region having thefirst conductive type dopants, disposed in the deep well region, thesecond layer region is located above and unconnected to the first layerregion, and the fourth layer region is located above the second layerregion to connect the second layer region to the top surface of theepitaxy layer.
 16. The semiconductor device of claim 1, wherein thefirst well region having a doping concentration of 1×10¹⁷ atoms/cm³ to8×10¹⁷ atoms/cm³.
 17. The semiconductor device of claim 2, wherein thesecond well region having a doping concentration of 1×10¹⁷ atoms/cm³ to8×10¹⁷ atoms/cm³.
 18. The semiconductor device of claim 3, wherein thefirst doped region having a doping concentration of 1×10¹⁸ atoms/cm³ to1×10²¹ atoms/cm³.